In-situ surface preparation of nominally on-axis 4H-SiC substrates

Published 2008 View Full Article

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Title
In-situ surface preparation of nominally on-axis 4H-SiC substrates
Authors
Keywords
-
Journal
JOURNAL OF CRYSTAL GROWTH
Volume 310, Issue 20, Pages 4430-4437
Publisher
Elsevier BV
Online
2008-07-14
DOI
10.1016/j.jcrysgro.2008.06.083

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