Grown-in defects in silicon produced by agglomeration of vacancies and self-interstitials

Published 2007 View Full Article

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Title
Grown-in defects in silicon produced by agglomeration of vacancies and self-interstitials
Authors
Keywords
-
Journal
JOURNAL OF CRYSTAL GROWTH
Volume 310, Issue 7-9, Pages 1307-1314
Publisher
Elsevier BV
Online
2007-11-27
DOI
10.1016/j.jcrysgro.2007.11.100

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