Well-defined diblock and triblock copolymers for KrF lithography

Title
Well-defined diblock and triblock copolymers for KrF lithography
Authors
Keywords
-
Journal
JOURNAL OF APPLIED POLYMER SCIENCE
Volume 118, Issue 6, Pages 3245-3254
Publisher
Wiley
Online
2010-07-14
DOI
10.1002/app.32610

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