Synthesis of a photo-patternable cross-linked epoxy system containing photodegradable carbonate units for deep UV lithography

Title
Synthesis of a photo-patternable cross-linked epoxy system containing photodegradable carbonate units for deep UV lithography
Authors
Keywords
-
Journal
JOURNAL OF APPLIED POLYMER SCIENCE
Volume 114, Issue 4, Pages 2093-2100
Publisher
Wiley
Online
2009-07-02
DOI
10.1002/app.29870

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