On the optical and morphological properties of microstructured Black Silicon obtained by cryogenic-enhanced plasma reactive ion etching
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Title
On the optical and morphological properties of microstructured Black Silicon obtained by cryogenic-enhanced plasma reactive ion etching
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 113, Issue 19, Pages 194903
Publisher
AIP Publishing
Online
2013-05-17
DOI
10.1063/1.4805024
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