Electrical transport phenomena prevailing in undoped nc-Si/a-SiNx:H thin films prepared by inductively coupled plasma chemical vapor deposition
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Title
Electrical transport phenomena prevailing in undoped nc-Si/a-SiNx:H thin films prepared by inductively coupled plasma chemical vapor deposition
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 114, Issue 7, Pages 073708
Publisher
AIP Publishing
Online
2013-08-22
DOI
10.1063/1.4818512
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