Low surface energy and corrosion resistant ultrathin TiSiC disk overcoat

Title
Low surface energy and corrosion resistant ultrathin TiSiC disk overcoat
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 113, Issue 21, Pages 213513
Publisher
AIP Publishing
Online
2013-06-06
DOI
10.1063/1.4809558

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