Erosion evolution in mono-crystalline silicon surfaces caused by acoustic cavitation bubbles
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Title
Erosion evolution in mono-crystalline silicon surfaces caused by acoustic cavitation bubbles
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 113, Issue 6, Pages 064902
Publisher
AIP Publishing
Online
2013-02-13
DOI
10.1063/1.4791582
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