Thermoplastic deformation of silicon surfaces induced by ultrashort pulsed lasers in submelting conditions

Title
Thermoplastic deformation of silicon surfaces induced by ultrashort pulsed lasers in submelting conditions
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 111, Issue 5, Pages 053502
Publisher
AIP Publishing
Online
2012-03-05
DOI
10.1063/1.3688020

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