Characterization of grain boundaries in multicrystalline silicon with high lateral resolution using conductive atomic force microscopy

Title
Characterization of grain boundaries in multicrystalline silicon with high lateral resolution using conductive atomic force microscopy
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 112, Issue 3, Pages 034909
Publisher
AIP Publishing
Online
2012-08-15
DOI
10.1063/1.4746742

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