Atomic scale observation of phase separation and formation of silicon clusters in Hf higk-κ silicates

Title
Atomic scale observation of phase separation and formation of silicon clusters in Hf higk-κ silicates
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 111, Issue 10, Pages 103519
Publisher
AIP Publishing
Online
2012-05-22
DOI
10.1063/1.4718440

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