Simulation of particle velocity in a laser-produced tin plasma extreme ultraviolet source

Efficient laser-produced plasma extreme ultraviolet sources using grooved Sn targets

(2010) S. S. Harilal et al.   APPLIED PHYSICS LETTERS

Analysis of atomic and ion debris features of laser-produced Sn and Li plasmas

(2010) R. W. Coons et al.   JOURNAL OF APPLIED PHYSICS

The effect of laser wavelength on emission and particle dynamics of Sn plasma

(2010) D. Campos et al.   JOURNAL OF APPLIED PHYSICS

Laser-heated discharge plasma extreme ultraviolet source

(2010) Malcolm W McGeoch   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Performance results of laser-produced plasma test and prototype light sources for EUV lithography

(2009) Norbert R. Böwering   Journal of Micro-Nanolithography MEMS and MOEMS

Atomistic Modeling of Short Pulse Laser Ablation of Metals: Connections between Melting, Spallation, and Phase Explosion

(2009) Leonid V. Zhigilei et al.   Journal of Physical Chemistry C

Neutral Debris Mitigation in Laser Produced Extreme Ultraviolet Light Source by the Use of Minimum-Mass Tin Target

(2008) Masashi Shimomura et al.   Applied Physics Express

Structural, dynamic, and electronic properties of liquid tin: An ab initio molecular dynamics study

(2008) L. Calderín et al.   JOURNAL OF CHEMICAL PHYSICS

Electron-phonon coupling and electron heat capacity of metals under conditions of strong electron-phonon nonequilibrium

(2008) Zhibin Lin et al.   PHYSICAL REVIEW B

Plasma physics and radiation hydrodynamics in developing an extreme ultraviolet light source for lithography

(2008) Katsunobu Nishihara et al.   PHYSICS OF PLASMAS