Formation and annealing of dislocation loops induced by nitrogen implantation of ZnO

Title
Formation and annealing of dislocation loops induced by nitrogen implantation of ZnO
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 109, Issue 2, Pages 023513
Publisher
AIP Publishing
Online
2011-01-21
DOI
10.1063/1.3537917

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