Viscous damping of nanobeam resonators: Humidity, thermal noise, and a paddling effect

Title
Viscous damping of nanobeam resonators: Humidity, thermal noise, and a paddling effect
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 110, Issue 3, Pages 034320
Publisher
AIP Publishing
Online
2011-08-16
DOI
10.1063/1.3619854

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