n-type conductivity and phase transition in ultrananocrystalline diamond films by oxygen ion implantation and annealing

Published 2011 View Full Article

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Title
n-type conductivity and phase transition in ultrananocrystalline diamond films by oxygen ion implantation and annealing
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 109, Issue 5, Pages 053524
Publisher
AIP Publishing
Online
2011-03-16
DOI
10.1063/1.3556741
References
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