Modeling stress retarded self-limiting oxidation of suspended silicon nanowires for the development of silicon nanowire-based nanodevices

Published 2011 View Full Article

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Title
Modeling stress retarded self-limiting oxidation of suspended silicon nanowires for the development of silicon nanowire-based nanodevices
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 110, Issue 3, Pages 033524
Publisher
AIP Publishing
Online
2011-08-11
DOI
10.1063/1.3611420
References
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