Infrared birefringence imaging of residual stress and bulk defects in multicrystalline silicon

Title
Infrared birefringence imaging of residual stress and bulk defects in multicrystalline silicon
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 108, Issue 6, Pages 063528
Publisher
AIP Publishing
Online
2010-09-23
DOI
10.1063/1.3468404

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