Probing the heat affected zone by chemical modifications in femtosecond pulse laser ablation of titanium nitride films in air

Published 2010 View Full Article

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Title
Probing the heat affected zone by chemical modifications in femtosecond pulse laser ablation of titanium nitride films in air
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 107, Issue 5, Pages 054902
Publisher
AIP Publishing
Online
2010-03-04
DOI
10.1063/1.3311552
References
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