Measurement of optical constants of Si and SiO2 from reflection electron energy loss spectra using factor analysis method

Published 2010 View Full Article

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Title
Measurement of optical constants of Si and SiO2 from reflection electron energy loss spectra using factor analysis method
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 107, Issue 8, Pages 083709
Publisher
AIP Publishing
Online
2010-04-28
DOI
10.1063/1.3346345
References
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