Effect of threading screw and edge dislocations on transport properties of 4H–SiC homoepitaxial layers

Published 2010 View Full Article

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Title
Effect of threading screw and edge dislocations on transport properties of 4H–SiC homoepitaxial layers
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 108, Issue 1, Pages 013708
Publisher
AIP Publishing
Online
2010-07-09
DOI
10.1063/1.3448230
References
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