Self-alignment of silicon chips on wafers: A capillary approach

Published 2010 View Full Article

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Title
Self-alignment of silicon chips on wafers: A capillary approach
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 108, Issue 5, Pages 054905
Publisher
AIP Publishing
Online
2010-09-11
DOI
10.1063/1.3466782
References
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