Surface stoichiometry and activity control for atomically smooth low dislocation density ZnO and pseudomorphic MgZnO epitaxy on a Zn-polar ZnO substrate by the helicon-wave-excited-plasma sputtering epitaxy method

Title
Surface stoichiometry and activity control for atomically smooth low dislocation density ZnO and pseudomorphic MgZnO epitaxy on a Zn-polar ZnO substrate by the helicon-wave-excited-plasma sputtering epitaxy method
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 108, Issue 6, Pages 063541
Publisher
AIP Publishing
Online
2010-10-01
DOI
10.1063/1.3485600

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