Bilayer metal gate electrodes with tunable work function: Adhesion and interface characterization

Published 2010 View Full Article

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Title
Bilayer metal gate electrodes with tunable work function: Adhesion and interface characterization
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 108, Issue 5, Pages 053704
Publisher
AIP Publishing
Online
2010-09-04
DOI
10.1063/1.3466957
References
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