Complex phase compositions in nanostructured coatings as evidenced by photoelectron spectroscopy: The case of Al–Si–N hard coatings

Published 2010 View Full Article

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Title
Complex phase compositions in nanostructured coatings as evidenced by photoelectron spectroscopy: The case of Al–Si–N hard coatings
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 108, Issue 2, Pages 023508
Publisher
AIP Publishing
Online
2010-07-27
DOI
10.1063/1.3460099
References
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