Maskless fabrication of large scale Si nanohole array via laser annealed metal nanoparticles catalytic etching for photovoltaic application

Title
Maskless fabrication of large scale Si nanohole array via laser annealed metal nanoparticles catalytic etching for photovoltaic application
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 108, Issue 2, Pages 024301
Publisher
AIP Publishing
Online
2010-07-18
DOI
10.1063/1.3462397

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