An investigation of the electrical properties of metal-insulator-silicon capacitors with pyrolytic carbon electrodes

Title
An investigation of the electrical properties of metal-insulator-silicon capacitors with pyrolytic carbon electrodes
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 108, Issue 10, Pages 104508
Publisher
AIP Publishing
Online
2010-11-23
DOI
10.1063/1.3511750

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