Spatially correlated erbium and Si nanocrystals in coimplanted SiO2 after a single high temperature anneal

Published 2010 View Full Article

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Title
Spatially correlated erbium and Si nanocrystals in coimplanted SiO2 after a single high temperature anneal
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 107, Issue 4, Pages 044316
Publisher
AIP Publishing
Online
2010-02-26
DOI
10.1063/1.3294645
References
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