Grain size and strain effects on the optical and electrical properties of hafnium oxide nanocrystalline thin films

Title
Grain size and strain effects on the optical and electrical properties of hafnium oxide nanocrystalline thin films
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 108, Issue 8, Pages 083529
Publisher
AIP Publishing
Online
2010-10-28
DOI
10.1063/1.3499325

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