The same etchant produces both near-atomically flat and microfaceted Si(100) surfaces: The effects of gas evolution on etch morphology

Published 2010 View Full Article

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Title
The same etchant produces both near-atomically flat and microfaceted Si(100) surfaces: The effects of gas evolution on etch morphology
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 107, Issue 10, Pages 103520
Publisher
AIP Publishing
Online
2010-05-22
DOI
10.1063/1.3402580
References
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