High mobility amorphous zinc oxynitride semiconductor material for thin film transistors

Published 2009 View Full Article

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Title
High mobility amorphous zinc oxynitride semiconductor material for thin film transistors
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 106, Issue 7, Pages 074512
Publisher
AIP Publishing
Online
2009-10-14
DOI
10.1063/1.3236663
References
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