Origin of ultralow permittivity in polyimide/mesoporous silicate nanohybrid films with high resistivity and high breakdown strength

Published 2009 View Full Article

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Title
Origin of ultralow permittivity in polyimide/mesoporous silicate nanohybrid films with high resistivity and high breakdown strength
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 105, Issue 4, Pages 044104
Publisher
AIP Publishing
Online
2009-02-20
DOI
10.1063/1.3074102

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