Advanced oxidation process combining oxide deposition and short postoxidation step for N-type 3C- and 4H-SiC

Published 2009 View Full Article

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Title
Advanced oxidation process combining oxide deposition and short postoxidation step for N-type 3C- and 4H-SiC
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 106, Issue 4, Pages 044514
Publisher
AIP Publishing
Online
2009-08-29
DOI
10.1063/1.3204646
References
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