Ga-implantation in Ge: Electrical activation and clustering

Published 2009 View Full Article

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Title
Ga-implantation in Ge: Electrical activation and clustering
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 106, Issue 1, Pages 013518
Publisher
AIP Publishing
Online
2009-07-10
DOI
10.1063/1.3159031
References
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