Local mapping of interface traps in HfSiO/Si structure by scanning capacitance microscopy using dV/dC signal

Published 2009 View Full Article

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Title
Local mapping of interface traps in HfSiO/Si structure by scanning capacitance microscopy using dV/dC signal
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 105, Issue 9, Pages 093708
Publisher
AIP Publishing
Online
2009-05-06
DOI
10.1063/1.3122597

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