Journal
JOURNAL OF APPLIED PHYSICS
Volume 105, Issue 6, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.3094012
Keywords
gallium compounds; III-V semiconductors; optical frequency conversion; optical materials; optical phase matching; optical waveguides; rib waveguides; sputter etching; terahertz wave generation
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We constructed rib waveguides from GaP material using an inductively coupled plasma reactive ion etching technique based on Ar/Cl-2 gas application. We obtained a waveguide with a rib height of 200 mu m. Terahertz-wave generation from the GaP-crystal rib waveguides was demonstrated via collinear phase-matched difference-frequency mixing of near-infrared light. The terahertz output peak corresponding to the fundamental modes appeared around 0.75 THz for a 1-mm-wide rib waveguide. The position of the fundamental mode shifted to 1.32 THz for a 200-mu m-wide waveguide, which is attributable to the two-dimensional confinement of the terahertz waves in the waveguide. The conversion efficiency was enhanced in the rib waveguide compared to that in both slab waveguides and bulk GaP crystals.
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