Fabrication and characterization of metal-ferroelectric (PbZr0.6Ti0.4O3)-insulator (La2O3)-semiconductor capacitors for nonvolatile memory applications

Title
Fabrication and characterization of metal-ferroelectric (PbZr0.6Ti0.4O3)-insulator (La2O3)-semiconductor capacitors for nonvolatile memory applications
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 105, Issue 6, Pages 061625
Publisher
AIP Publishing
Online
2009-03-17
DOI
10.1063/1.3055415

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