Analytical strain relaxation model for Si1−xGex/Si epitaxial layers

Published 2009 View Full Article

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Title
Analytical strain relaxation model for Si1−xGex/Si epitaxial layers
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 105, Issue 6, Pages 063519
Publisher
AIP Publishing
Online
2009-03-25
DOI
10.1063/1.3093889

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