Electron-beam-induced current and cathodoluminescence study of dislocation arrays in 4H-SiC homoepitaxial layers

Title
Electron-beam-induced current and cathodoluminescence study of dislocation arrays in 4H-SiC homoepitaxial layers
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 106, Issue 7, Pages 074502
Publisher
AIP Publishing
Online
2009-10-09
DOI
10.1063/1.3236579

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