Thermal stability of lanthanum in hafnium-based gate stacks

Published 2009 View Full Article

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Title
Thermal stability of lanthanum in hafnium-based gate stacks
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 106, Issue 5, Pages 053506
Publisher
AIP Publishing
Online
2009-09-03
DOI
10.1063/1.3190505
References
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