Effects of silylation on fracture and mechanical properties of mesoporous silica films interfaced with copper

Title
Effects of silylation on fracture and mechanical properties of mesoporous silica films interfaced with copper
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 106, Issue 5, Pages 054502
Publisher
AIP Publishing
Online
2009-09-02
DOI
10.1063/1.3183933

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