Phase control of iridium and iridium oxide thin films in atomic layer deposition

Published 2008 View Full Article

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Title
Phase control of iridium and iridium oxide thin films in atomic layer deposition
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 103, Issue 2, Pages 023517
Publisher
AIP Publishing
Online
2008-01-29
DOI
10.1063/1.2836965

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