Etching characteristics of LiNbO3 in reactive ion etching and inductively coupled plasma

Title
Etching characteristics of LiNbO3 in reactive ion etching and inductively coupled plasma
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 103, Issue 3, Pages 034109
Publisher
AIP Publishing
Online
2008-02-15
DOI
10.1063/1.2838180

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