Intrinsic and extrinsic diffusion of phosphorus, arsenic, and antimony in germanium

Published 2008 View Full Article

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Title
Intrinsic and extrinsic diffusion of phosphorus, arsenic, and antimony in germanium
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 103, Issue 3, Pages 033508
Publisher
AIP Publishing
Online
2008-02-07
DOI
10.1063/1.2837103

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