Modeling self-annealing kinetics in electroplated Cu thin films

Published 2008 View Full Article

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Title
Modeling self-annealing kinetics in electroplated Cu thin films
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 103, Issue 11, Pages 113521
Publisher
AIP Publishing
Online
2008-06-14
DOI
10.1063/1.2937249
References
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