Influence of stress on the structural and dielectric properties of rf magnetron sputtered zinc oxide thin film

Published 2008 View Full Article

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Title
Influence of stress on the structural and dielectric properties of rf magnetron sputtered zinc oxide thin film
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 103, Issue 9, Pages 094903
Publisher
AIP Publishing
Online
2008-05-04
DOI
10.1063/1.2903531

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