Influence of absorbed water components on SiOCH low-k reliability

Published 2008 View Full Article

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Title
Influence of absorbed water components on SiOCH low-k reliability
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 104, Issue 3, Pages 034113
Publisher
AIP Publishing
Online
2008-08-16
DOI
10.1063/1.2966578

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