Experiment and simulation of the compositional evolution of Ti–B thin films deposited by sputtering of a compound target

Published 2008 View Full Article

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Title
Experiment and simulation of the compositional evolution of Ti–B thin films deposited by sputtering of a compound target
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 104, Issue 6, Pages 063304
Publisher
AIP Publishing
Online
2008-09-24
DOI
10.1063/1.2978211

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