A solid phase reaction between TiCx thin films and Al2O3 substrates

Published 2008 View Full Article

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Title
A solid phase reaction between TiCx thin films and Al2O3 substrates
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 103, Issue 6, Pages 066102
Publisher
AIP Publishing
Online
2008-03-18
DOI
10.1063/1.2896637
References
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