High-resolution nanofabrication using a highly focused electron beam

Published 2008 View Full Article

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Title
High-resolution nanofabrication using a highly focused electron beam
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 104, Issue 2, Pages 024312
Publisher
AIP Publishing
Online
2008-07-25
DOI
10.1063/1.2957590
References
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