The use of nanolaminates to obtain structurally stable high-K films with superior electrical properties: HfNO–HfTiO

Published 2008 View Full Article

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Title
The use of nanolaminates to obtain structurally stable high-K films with superior electrical properties: HfNO–HfTiO
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 103, Issue 11, Pages 114106
Publisher
AIP Publishing
Online
2008-06-10
DOI
10.1063/1.2936895

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